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ACLS        0001113232    
Filing Date Form Type Description Document
2021-08-25 4 FORM 4 SUBMISSION View Document
2021-08-16 4 FORM 4 SUBMISSION View Document
2021-08-09 4 FORM 4 SUBMISSION View Document
2021-08-06 10-Q 10-Q View Document
2021-08-04 8-K FORM 8-K View Document
2021-05-24 4 FORM 4 SUBMISSION View Document
2021-05-21 4 FORM 4 SUBMISSION View Document
2021-05-18 4 FORM 4 SUBMISSION View Document
2021-05-18 4 FORM 4 SUBMISSION View Document
2021-05-18 4 FORM 4 SUBMISSION View Document
2021-05-18 4 FORM 4 SUBMISSION View Document
2021-05-18 4 FORM 4 SUBMISSION View Document
2021-05-18 4 FORM 4 SUBMISSION View Document
2021-05-18 SD SD View Document
2021-05-17 4 FORM 4 SUBMISSION View Document
2021-05-17 4 FORM 4 SUBMISSION View Document
2021-05-17 4 FORM 4 SUBMISSION View Document
2021-05-17 4 FORM 4 SUBMISSION View Document
2021-05-17 4 FORM 4 SUBMISSION View Document
2021-05-17 4 FORM 4 SUBMISSION View Document
2021-05-17 4 FORM 4 SUBMISSION View Document
2021-05-13 8-K FORM 8-K View Document
2021-05-06 10-Q 10-Q View Document
2021-05-04 8-K FORM 8-K View Document
2021-03-25 DEF 14A DEF 14A View Document
2021-03-12 4 FORM 4 SUBMISSION View Document
2021-03-12 4 FORM 4 SUBMISSION View Document
2021-03-03 4 FORM 4 SUBMISSION View Document
2021-03-02 4 FORM 4 SUBMISSION View Document
2021-03-02 4 FORM 4 SUBMISSION View Document
2021-03-02 4 FORM 4 SUBMISSION View Document
2021-03-02 4 FORM 4 SUBMISSION View Document
2021-03-02 4 FORM 4 SUBMISSION View Document
2021-02-26 10-K 10-K View Document
2021-02-25 4 FORM 4 SUBMISSION View Document
2021-02-19 4 FORM 4 SUBMISSION View Document
2021-02-18 4 FORM 4 SUBMISSION View Document
2021-02-17 4 FORM 4 SUBMISSION View Document
2021-02-17 4 FORM 4 SUBMISSION View Document
2021-02-12 SC 13G/A AXCELIS TECHNOLOGIES, INC. View Document
2021-02-12 SC 13G/A SEC SCHEDULE 13G View Document
2021-02-12 SC 13G/A SC 13G/A View Document
2021-02-10 8-K FORM 8-K View Document
2021-02-10 SC 13G/A SCHEDULE 13G/A View Document
2021-02-04 SC 13G/A SEC SCHEDULE 13G View Document
2021-01-26 SC 13G/A View Document
2020-12-01 4 FORM 4 SUBMISSION View Document
2020-11-24 4 FORM 4 SUBMISSION View Document
2020-11-18 4/A FORM 4/A SUBMISSION View Document
2020-11-17 4 FORM 4 SUBMISSION View Document
2020-11-17 4 FORM 4 SUBMISSION View Document
2020-11-06 10-Q 10-Q View Document
2020-11-05 8-K FORM 8-K View Document
2020-08-05 10-Q 10-Q View Document
2020-08-04 8-K FORM 8-K View Document
2020-05-29 4 FORM 4 SUBMISSION View Document
2020-05-29 S-3ASR S-3ASR View Document
2020-05-29 S-8 S-8 View Document
2020-05-28 4 FORM 4 SUBMISSION View Document
2020-05-28 4/A FORM 4/A SUBMISSION View Document
2020-05-26 4 FORM 4 SUBMISSION View Document
2020-05-26 4 FORM 4 SUBMISSION View Document
2020-05-22 4 FORM 4 SUBMISSION View Document
2020-05-22 SD SD View Document
2020-05-21 8-K/A 8-K/A View Document
2020-05-21 8-K FORM 8-K View Document
2020-05-19 4 FORM 4 SUBMISSION View Document
2020-05-19 4 FORM 4 SUBMISSION View Document
2020-05-19 4 FORM 4 SUBMISSION View Document
2020-05-19 4 FORM 4 SUBMISSION View Document
2020-05-19 4 FORM 4 SUBMISSION View Document
2020-05-19 4 FORM 4 SUBMISSION View Document
2020-05-19 4 FORM 4 SUBMISSION View Document
2020-05-15 4 FORM 4 SUBMISSION View Document
2020-05-15 4 FORM 4 SUBMISSION View Document
2020-05-15 4 FORM 4 SUBMISSION View Document
2020-05-15 4 FORM 4 SUBMISSION View Document
2020-05-15 4 FORM 4 SUBMISSION View Document
2020-05-15 4 FORM 4 SUBMISSION View Document
2020-05-15 4 FORM 4 SUBMISSION View Document
2020-05-15 4 FORM 4 SUBMISSION View Document
2020-05-11 4 FORM 4 SUBMISSION View Document
2020-05-08 4 FORM 4 SUBMISSION View Document
2020-05-08 4 FORM 4 SUBMISSION View Document
2020-05-06 10-Q 10-Q View Document
2020-05-05 8-K FROM 8-K View Document
2020-03-30 DEF 14A DEF 14A View Document
2020-03-04 4 FORM 4 SUBMISSION View Document
2020-03-03 4 FORM 4 SUBMISSION View Document
2020-03-02 4 FORM 4 SUBMISSION View Document
2020-03-02 4 FORM 4 SUBMISSION View Document
2020-03-02 4 FORM 4 SUBMISSION View Document
2020-03-02 4 FORM 4 SUBMISSION View Document
2020-03-02 4 FORM 4 SUBMISSION View Document
2020-03-02 4 FORM 4 SUBMISSION View Document
2020-03-02 10-K 10-K View Document
2020-02-20 4 FORM 4 SUBMISSION View Document
2020-02-13 4 FORM 4 SUBMISSION View Document
2020-02-13 4 FORM 4 SUBMISSION View Document
2020-02-12 4 FORM 4 SUBMISSION View Document

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