FILINGS
| ACLS 0001113232 | |||
|---|---|---|---|
| Filing Date | Form Type | Description | Document |
| 2023-02-24 | 10-K | 10-K | View Document |
| 2023-02-14 | 4 | FORM 4 SUBMISSION | View Document |
| 2023-02-13 | 4 | FORM 4 SUBMISSION | View Document |
| 2023-02-13 | 4 | FORM 4 SUBMISSION | View Document |
| 2023-02-13 | 4 | FORM 4 SUBMISSION | View Document |
| 2023-02-13 | 4 | FORM 4 SUBMISSION | View Document |
| 2023-02-13 | 4 | FORM 4 SUBMISSION | View Document |
| 2023-02-13 | 4 | FORM 4 SUBMISSION | View Document |
| 2023-02-13 | 4 | FORM 4 SUBMISSION | View Document |
| 2023-02-10 | SC 13G/A | AXCELIS TECHNOLOGIES, INC. | View Document |
| 2023-02-09 | SC 13G/A | SCHEDULE 13G/A | View Document |
| 2023-02-08 | 8-K | FORM 8-K | View Document |
| 2023-01-26 | SC 13G/A | View Document | |
| 2023-01-20 | SC 13G/A | View Document | |
| 2022-12-15 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-12-14 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-12-09 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-12-08 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-12-05 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-11-30 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-11-28 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-11-28 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-11-23 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-11-21 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-11-18 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-11-15 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-11-15 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-11-14 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-11-10 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-11-03 | 10-Q | 10-Q | View Document |
| 2022-11-02 | 8-K | FORM 8-K | View Document |
| 2022-10-27 | SC 13G | AXCELIS TECHNOLOGIES, INC. | View Document |
| 2022-10-07 | SC 13G/A | PRIMECAP MANAGEMENT CO/CA/ | View Document |
| 2022-09-15 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-09-06 | 3 | FORM 3 SUBMISSION | View Document |
| 2022-08-25 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-08-15 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-08-12 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-08-12 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-08-12 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-08-12 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-08-08 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-08-04 | 10-Q | 10-Q | View Document |
| 2022-08-03 | 8-K | FORM 8-K | View Document |
| 2022-05-20 | SD | SD | View Document |
| 2022-05-18 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-05-18 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-05-18 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-05-18 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-05-18 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-05-18 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-05-16 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-05-16 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-05-16 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-05-16 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-05-16 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-05-16 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-05-16 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-05-16 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-05-11 | 8-K | FORM 8-K | View Document |
| 2022-05-05 | 10-Q | 10-Q | View Document |
| 2022-05-04 | 8-K | FORM 8-K | View Document |
| 2022-03-30 | DEF 14A | DEF 14A | View Document |
| 2022-03-17 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-03-16 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-03-15 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-03-15 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-03-03 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-03-02 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-03-02 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-03-02 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-03-02 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-03-02 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-03-02 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-02-28 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-02-25 | 10-K | 10-K | View Document |
| 2022-02-24 | 8-K | FORM 8-K | View Document |
| 2022-02-23 | 3 | FORM 3 SUBMISSION | View Document |
| 2022-02-23 | 3 | FORM 3 SUBMISSION | View Document |
| 2022-02-10 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-02-10 | SC 13G/A | PRIMECAP MANAGEMENT CO/CA/ | View Document |
| 2022-02-09 | SC 13G/A | AXCELIS TECHNOLOGIES, INC. | View Document |
| 2022-02-09 | SC 13G/A | SCHEDULE 13G/A | View Document |
| 2022-02-08 | SC 13G/A | SEC SCHEDULE 13G | View Document |
| 2022-02-07 | 8-K | FORM 8-K | View Document |
| 2022-01-28 | SC 13G/A | View Document | |
| 2021-12-09 | 4 | FORM 4 SUBMISSION | View Document |
| 2021-11-22 | 4 | FORM 4 SUBMISSION | View Document |
| 2021-11-12 | 4 | FORM 4 SUBMISSION | View Document |
| 2021-11-08 | 4 | FORM 4 SUBMISSION | View Document |
| 2021-11-08 | 4 | FORM 4 SUBMISSION | View Document |
| 2021-11-05 | 10-Q | 10-Q | View Document |
| 2021-11-03 | 8-K | FORM 8-K | View Document |
| 2021-09-15 | 4 | FORM 4 SUBMISSION | View Document |
| 2021-08-31 | 4 | FORM 4 SUBMISSION | View Document |
| 2021-08-30 | 4 | FORM 4 SUBMISSION | View Document |
| 2021-08-30 | 4 | FORM 4 SUBMISSION | View Document |
| 2021-08-27 | 4 | FORM 4 SUBMISSION | View Document |
| 2021-08-27 | 4 | FORM 4 SUBMISSION | View Document |
| 2021-08-27 | 4 | FORM 4 SUBMISSION | View Document |
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